تأثیر تابع پتانسیل بر شبیه‌سازی دینامیک مولکولی فرآیند ماشین‌کاری نانومتری سیلیکون تک‌کریستال

نوع مقاله : مقاله پژوهشی

نویسندگان

صنعتی خواجه نصیرالدین طوسی

چکیده

فرآیند ماشین‌کاری نانومتری روشی پیشرفته جهت ساخت قطعات ترد سیلیکونی با صافی سطح نانومتری می‌باشد. با استفاده از شبیه‌سازی دینامیک مولکولی این فرآیند می‌توان به جزئیات ارزشمندی از مکانیزم ماشین‌کاری دست یافت. انتخاب تابع پتانسیل مناسب، اصلی‌ترین پارامتر در تعیین نتایج یک شبیه‌سازی دینامیک مولکولی می‌باشد. در این مقاله از ترکیب سه تابع پتانسیل مورس، ترسوف و استیلینگر-وبر جهت تعریف اندرکنش‌های بین ذره‌ای استفاده شده است. مکانیزم ماشین‌کاری، دمای قطعه‌کار، نیروهای ماشین‌کاری، انرژی سیستم و آسیب‌های زیر سطحی قطعه‌کار مواردی بودند که جهت مقایسه این توابع پتانسیل مورد مطالعه قرار گرفتند. نتایج نشان داد که استفاده از ترکیب تابع پتانسیل مورس و ترسوف، سبب تغییر مکانیزم ماشین‌کاری به حالت ترد گردیده و انرژی سیستم را تا حد 3/7 % کاهش می‌دهد. همچنین مشخص گردید که اندرکنش بین اتم‌های ابزار و قطعه‌کار تأثیر بیشتری در تعیین دمای قطعه‌کار و نیروهای ماشین‌کاری دارد.

کلیدواژه‌ها


عنوان مقاله [English]

The Effect of Interatomic Potential Function on Nanometric Machining of Single Crystal Silicon

نویسندگان [English]

  • Seyed Nader Ameli Kalkhoran
  • Mehrdad Vahvadi
K.N.Toosi University of Technology
چکیده [English]

Nanometric machining process is an advanced method for producing brittle silicon workpiece with nano-level surface finish. With the aid of molecular dynamics simulation, valuable details of machining mechanism could be obtained. Choosing the appropriate potential function is the main parameter in determining the results of this simulation. In this paper, the combination of the three potential functions of Morse, Tersoff, and Stillinger-Weber is used to define interatomic interactions. The machining mechanism, workpiece temperature, cutting forces, systems’ energy as well as subsurface damages were studied to compare these potential functions. The results exhibit that using the combination of the Morse and Tersoff potential function would change the machining mechanism to brittle mode and reduce the system energy by as much as 7.3%. It is also found that the interaction between tool and workpiece has a greater influence on the determination of the workpiece temperature and machining forces.

کلیدواژه‌ها [English]

  • Nanometric Machining
  • Molecular Dynamics
  • Potential Function
  • Silicon
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