Numerical simulation of a micropump based on piezoelectric actuator

Document Type : Original Article

Authors

Department of Mechanical Engineering, Shahrekord University, Shahrekord, Iran

Abstract

This paper considers a three-dimensional micropump based on a piezoelectric actuator. COMSOL software version 6.5 is used to simulate the performance of the micropump. At first, a reference micropump is defined, which works at a frequency of 60 Hz and a voltage of 1500 V that is capable of pumping a maximum flow rate of 0.038 ml/s. The influence of frequency, voltage, the axial position of input and output of micropump, dimensions of piezoelectric actuator and membrane, and shape of the actuator on the fluid output flow rate and pumped fluid volume is investigated. The results demonstrate that the frequency, voltage, dimensions of the piezoelectric actuator and the membrane has a direct effect on the output flow rate and the pumped fluid volume so that the output flow rate of the fluid and the volume of the pumped fluid increase with the increase of these parameters. For example, the output flow rate of the micropump at 100 and 20 Hz frequency is 0.065 and 0.011 ml/s, respectively. By increasing the voltage from 1500 to 1875 V, the micropump output flow rate increases to 0.047 ml/s. The results show that the rectangular piezoelectric actuator has a lower efficiency than the circular one.

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